Imaging layers for the directed assembly of block copolymer films: Dependence of the physical and chemical properties of patterned polymer brushes on brush molecular weight
Author
KO Stuen, I In, E Han, JA Streifer, RJ Hamers, PF Nealey, P Gopalan
Journal
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena